JPH0461526B2 - - Google Patents

Info

Publication number
JPH0461526B2
JPH0461526B2 JP58113537A JP11353783A JPH0461526B2 JP H0461526 B2 JPH0461526 B2 JP H0461526B2 JP 58113537 A JP58113537 A JP 58113537A JP 11353783 A JP11353783 A JP 11353783A JP H0461526 B2 JPH0461526 B2 JP H0461526B2
Authority
JP
Japan
Prior art keywords
piezoelectric
thickness
region
vibration
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58113537A
Other languages
English (en)
Japanese (ja)
Other versions
JPS605619A (ja
Inventor
Tetsuo Konno
Shunei Samejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seikosha KK
Original Assignee
Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seikosha KK filed Critical Seikosha KK
Priority to JP11353783A priority Critical patent/JPS605619A/ja
Publication of JPS605619A publication Critical patent/JPS605619A/ja
Publication of JPH0461526B2 publication Critical patent/JPH0461526B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/177Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP11353783A 1983-06-23 1983-06-23 厚みすべり圧電振動子 Granted JPS605619A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11353783A JPS605619A (ja) 1983-06-23 1983-06-23 厚みすべり圧電振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11353783A JPS605619A (ja) 1983-06-23 1983-06-23 厚みすべり圧電振動子

Publications (2)

Publication Number Publication Date
JPS605619A JPS605619A (ja) 1985-01-12
JPH0461526B2 true JPH0461526B2 (en]) 1992-10-01

Family

ID=14614829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11353783A Granted JPS605619A (ja) 1983-06-23 1983-06-23 厚みすべり圧電振動子

Country Status (1)

Country Link
JP (1) JPS605619A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4696419B2 (ja) * 2001-07-30 2011-06-08 エプソントヨコム株式会社 圧電振動子
JP5136635B2 (ja) * 2010-12-20 2013-02-06 セイコーエプソン株式会社 圧電振動子
KR102035146B1 (ko) * 2014-05-26 2019-10-22 가부시키가이샤 아루박 성막 장치, 유기막의 막후 측정 방법 및 유기막용 막후 센서
JP6820690B2 (ja) * 2016-08-26 2021-01-27 京セラ株式会社 水晶振動素子の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5058994A (en]) * 1973-09-26 1975-05-22

Also Published As

Publication number Publication date
JPS605619A (ja) 1985-01-12

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