JPH0461526B2 - - Google Patents
Info
- Publication number
- JPH0461526B2 JPH0461526B2 JP58113537A JP11353783A JPH0461526B2 JP H0461526 B2 JPH0461526 B2 JP H0461526B2 JP 58113537 A JP58113537 A JP 58113537A JP 11353783 A JP11353783 A JP 11353783A JP H0461526 B2 JPH0461526 B2 JP H0461526B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- thickness
- region
- vibration
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11353783A JPS605619A (ja) | 1983-06-23 | 1983-06-23 | 厚みすべり圧電振動子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11353783A JPS605619A (ja) | 1983-06-23 | 1983-06-23 | 厚みすべり圧電振動子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS605619A JPS605619A (ja) | 1985-01-12 |
JPH0461526B2 true JPH0461526B2 (en]) | 1992-10-01 |
Family
ID=14614829
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11353783A Granted JPS605619A (ja) | 1983-06-23 | 1983-06-23 | 厚みすべり圧電振動子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS605619A (en]) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4696419B2 (ja) * | 2001-07-30 | 2011-06-08 | エプソントヨコム株式会社 | 圧電振動子 |
JP5136635B2 (ja) * | 2010-12-20 | 2013-02-06 | セイコーエプソン株式会社 | 圧電振動子 |
KR102035146B1 (ko) * | 2014-05-26 | 2019-10-22 | 가부시키가이샤 아루박 | 성막 장치, 유기막의 막후 측정 방법 및 유기막용 막후 센서 |
JP6820690B2 (ja) * | 2016-08-26 | 2021-01-27 | 京セラ株式会社 | 水晶振動素子の製造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5058994A (en]) * | 1973-09-26 | 1975-05-22 |
-
1983
- 1983-06-23 JP JP11353783A patent/JPS605619A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS605619A (ja) | 1985-01-12 |
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